Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions.
Microfabrication Fundamental Processes
Microfabrication Fundamental Processes
This course is part of Introduction to Semiconductor and MEMS Fabrication Specialization
Instructors: Rama Prasad
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Gain insight into a topic and learn the fundamentals.
Intermediate level
Recommended experience
8 hours to complete
Flexible schedule
Learn at your own pace
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Recently updated!
August 2025
Assessments
9 assignments
Taught in English
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This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization
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There are 3 modules in this course
In this module we cover thin film deposition using both physical and chemical methods. We briefly discuss some of the important features of thin films that determine the materials and deposition processes selected. A general introduction is provided for some of the most commonly used physical and chemical deposition methods.
What's included
3 videos2 readings3 assignments
In this module we discuss lithography techniques and technologies, which are one of the foundational process steps to all microfabrication technologies.
What's included
3 videos2 readings3 assignments
This module presents an introduction to the fundamental micromachining technology of etching. This is a subtractive process where material is removed to create or transfer pattern to thin film layers.
What's included
3 videos5 readings3 assignments
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